Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...

Distributed control systems and programmable logic controllers have long been used to regulate power plant operations, but advanced techniques that have been proven in refining and other industries ...

We propose an approach for the modeling, monitoring and control of operational risk in financial institutions based on a methodology that integrates business process modeling with statistical and ...